2. Articole
Permanent URI for this collectionhttps://msuir.usm.md/handle/123456789/47
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Item Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity [Articol](2005) Brînzari, Vladimir; Dmitriev, Serghei; Korotcenkov, GhenadiiThis paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing by order. It is conluded that combination of HF oxygen plasma treatment and surface sensibilization through surface doping is an effective way to considerable improvement of gas sensitive properties of tin dioxide based TFGS.Item Modeling of temperature regimes of thin film gas sensitive devices [Articol](2005) Dmitriev, SergheiThis paper presents results of the modeling of the temperature distribution in a chip of thin film gas sensor, operating at high temperatures (150-1000 oC), required to provide high sensitivity and selectivity to target gases. Analysis of thermal regimes of such chip was carried out on the base of model of plate with local source of heat. It was found that substrate heat conductivity is most influencing parameter, determining both temperature distribution in chip and also the electrical power consumption decreasing. The example of realized chips designed in accordance with results of modeling is presented. The results of modeling are compared with experimental data.