OZONE SENSING BY In2O3 FILMS MODIFIED WITH RH:DIMENSION EFFECT
Date
2021
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
MDPI
Abstract
We considered the effect of coverage of the surface of In2O3 films with rhodium on the
sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium
varied in the range of 0–0.1 ML. The In2O3 films deposited by spray pyrolysis had a thickness
of 40–50 nm. The sensor response to ozone depends on the degree of rhodium coverage. This
dependence has a pronounced maximum at a coverage of ~0.01 ML of Rh. An explanation is given
for this effect. It is concluded that the observed changes are associated with the transition from the
atomically dispersed state of rhodium to a 3D cluster state.
Description
Copyright: © 2021 by the authors.
Licensee MDPI, Basel, Switzerland.
This article is an open access article
distributed under the terms and
conditions of the Creative Commons
Attribution (CC BY) license (https://
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4.0/)
Keywords
surface modification, atomic dispersion, clustering, conductometric response, adsorption, decomposition, modeling
Citation
KOROTCHENKOV, G., NEHASIL, Vaclav. Ozone sensing by In2O3 films modified with rh: Dimension effect. In: Sensors . 2021, nr. 5(21), pp. 1-12. ISSN 1424-8220.