HOT WALL BEAM EPITAXIAL GROWTH OF PbTe LAYERS ON BaFdCaFdSi(llI) SUBSTRATES
Date
2000-10-10
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Institute of Electrical and Electronics Engineers Inc.
Abstract
PbTe(III) thin films were grown by the hot wall beam epitaxy (HWBE) technique on Si( III ) substrates using intermediate BaF2/CaF2 buffers grown by MBE. The best PbTe layers exhibit the high resolution X-ray rocking curve linewidth of about 130 arcsec,the low temperature Hall mobility of 8 x l d cm2Ns, and an excellent surface morphology with the roughness of a few angstrom as it was determined by the atomic force microscopy (AFM).
The results indicate that high-quality PbTe films can be obtained on fluoride covered Si(III ) substrates by simple and cheap HWBE method.
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Citation
BELENCIUC, Alexandr. Hot wall beam epitaxial growth of PbTe layers on BaF2/CaF2/Si(III) substrates. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 23, Octomber 10-14th 2000, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2000, Vol. 1, pp. 143-146.